Electricity: measuring and testing – Magnetic – Magnetometers
Reexamination Certificate
2007-04-24
2007-04-24
Lefkowitz, Edward (Department: 2862)
Electricity: measuring and testing
Magnetic
Magnetometers
C324S249000
Reexamination Certificate
active
10763394
ABSTRACT:
In a fluxgate sensor integrated in a semiconductor substrate and a method for manufacturing the same, the fluxgate sensor includes a soft magnetic core formed on the semiconductor substrate, an excitation coil winding the soft magnetic core and being insulated by first and second insulating layers deposited above and below the soft magnetic core, respectively, and a pick-up coil, winding the soft magnetic core and being insulated by third and fourth insulating layers deposited above and below the excitation coil, respectively.
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patent: 6411086 (2002-06-01), Choi et al.
patent: 6429651 (2002-08-01), Choi et al.
patent: 6690164 (2004-02-01), Fedeli et al.
patent: 2004/0027121 (2004-02-01), Choi et al.
patent: 08-179023 (1996-07-01), None
patent: 2001099654 (2001-04-01), None
English translation of the Detailed Description of JP 2001099654 A.
Liakopoulos, T.M., et al., “A micro-fluxgate magnetic sensor using micromachined planar solenoid coils”, Sensors & Actuators A, Elsevier Sequoia, S.,A. Lausanne, CH (Switzerland), vol. 77, No. 1, pp. 66-72, (Sep. 28, 1999).
Shim, Dong-Sik, et al., “Micro fluxgate sensor using solenoid driving and sensing coils”, Optoelectronic and Microelectronic Materials and Devices, 2002, Piscataway, NJ, USA, IEEE, pp. 237-240, (Dec. 11, 2002).
Choi Sang-on
Na Kyung-won
Park Hae-seok
Shim Dong-sik
Lee & Morse P.C.
Lefkowitz Edward
Samsung Electronics Co,. Ltd.
Schindler David M.
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