Flushing a multi-port valve manifold

Details Flushing a multi-port valve manifold Flushing a multi-port valve manifold

2005-08-02

2005-08-02

Raevis, Robert (Department: 2856)

Measuring and testing

Sampler, sample handling, etc.

Analyzer supplier

C073S064560

Reexamination Certificate

active

06923076

ABSTRACT:
A method for flushing gas pockets from a manifold that forms a part of a liquid sampling system that is compatible with a chemical-mechanical polishing system is described. A flushing liquid, e.g., ultra pure water, is introduced into, and expelled from, the manifold to expel gas pockets from the manifold. The method comprises the steps of opening a manifold vent, filling the manifold with the flushing liquid, and closing the vent to increase the velocity of the flushing liquid flowing through the manifold. The introduction of the flushing liquid is discontinued, and thereafter, resumed. The discontinuation and resumption steps are preferably repeated The manifold is thus flushed of gas pockets.

REFERENCES:
patent: 4993271 (1991-02-01), Vargason
patent: 5469751 (1995-11-01), Weiss et al.
patent: 6192768 (2001-02-01), Wallman et al.

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