Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1993-11-05
1995-04-04
Powell, William
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
1566591, 156668, 156904, B44C 122, B29C 3700
Patent
active
054034370
ABSTRACT:
This is a device and method of forming such, wherein the device has an amorphous "TEFLON" (TFE AF) layer. The method comprising: depositing an TFE AF layer 36 on a substrate; combining a fluorosurfactant with a first material to produce a second material 38; and depositing the second material 38 on the TFE AF layer 36. The method may include: patterning and etching the second material; removing the second material; and forming a third material 42 on the TFE AF layer 44. The third material may be a metal or a semiconductor. The ZFSNF fluorosurfactant may be combined with a photoresist and then patterned and etched. The TFE AF layer may also be heated. A second coating of the second material may also be added.
REFERENCES:
patent: 5298114 (1994-03-01), Takeshita et al.
Beratan Howard R.
Cho Chih-Chen
Summerfelt Scott R.
DeLeon Ruben C.
Donaldson Richard L.
Kesterson James C.
Powell William
Texas Instruments Incorporated
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