Organic compounds -- part of the class 532-570 series – Organic compounds – Carboxylic acid esters
Reexamination Certificate
2011-01-11
2011-01-11
Kumar, Shailendra (Department: 1621)
Organic compounds -- part of the class 532-570 series
Organic compounds
Carboxylic acid esters
C560S117000, C560S120000, C560S129000, C560S227000
Reexamination Certificate
active
07868199
ABSTRACT:
Fluoroalcohol compounds of formula (4) are prepared by reacting a fluorine compound of formula (1) with reducing agents or organometallic reagents of formulas (2) and (3) wherein R1is H or a monovalent C1-C20hydrocarbon group in which any —CH2— moiety may be replaced by —O— or —C(═O)—, R2is H or a monovalent C1-C6hydrocarbon group, R3and R4are H or a monovalent C1-C8hydrocarbon group, and M1is Li, Na, K, Mg, Zn, Al, B, or Si. From the fluoroalcohol compounds, fluorinated monomers can be produced in a simple and economic way, which are useful in producing polymers for the formulation of radiation-sensitive resist compositions.
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Hasegawa Koji
Kinsho Takeshi
Nishi Tsunehiro
Ohashi Masaki
Watanabe Takeru
Eudyna Devices Inc.
Kumar Shailendra
Westerman Hattori Daniels & Adrian LLP
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