Fluoroalcohol preparation method, fluorinated monomer,...

Details Fluoroalcohol preparation method, fluorinated monomer,... Fluoroalcohol preparation method, fluorinated monomer,...

2011-01-11

2011-01-11

Kumar, Shailendra (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Carboxylic acid esters

C560S117000, C560S120000, C560S129000, C560S227000

Reexamination Certificate

active

07868199

ABSTRACT:
Fluoroalcohol compounds of formula (4) are prepared by reacting a fluorine compound of formula (1) with reducing agents or organometallic reagents of formulas (2) and (3) wherein R1is H or a monovalent C1-C20hydrocarbon group in which any —CH2— moiety may be replaced by —O— or —C(═O)—, R2is H or a monovalent C1-C6hydrocarbon group, R3and R4are H or a monovalent C1-C8hydrocarbon group, and M1is Li, Na, K, Mg, Zn, Al, B, or Si. From the fluoroalcohol compounds, fluorinated monomers can be produced in a simple and economic way, which are useful in producing polymers for the formulation of radiation-sensitive resist compositions.

REFERENCES:
patent: 3438946 (1969-04-01), Lichstein et al.
patent: 5714625 (1998-02-01), Hada et al.
patent: 6004724 (1999-12-01), Yamato et al.
patent: 6261738 (2001-07-01), Asakura et al.
patent: 6312867 (2001-11-01), Kinsho et al.
patent: 6774258 (2004-08-01), Hasegawa et al.
patent: 6800418 (2004-10-01), Yoon et al.
patent: 6830866 (2004-12-01), Kobayashi et al.
patent: 6964840 (2005-11-01), Nishimura et al.
patent: 2003/0078352 (2003-04-01), Miyazawa et al.
patent: 2003/0224283 (2003-12-01), Allen et al.
patent: 2006/0246377 (2006-11-01), Yamato et al.
patent: 2006/0252897 (2006-11-01), Miyazawa et al.
patent: 1 164 434 (2001-12-01), None
patent: 1 616 854 (2006-01-01), None
patent: 9-95479 (1997-04-01), None
patent: 9-208554 (1997-08-01), None
patent: 9-230588 (1997-09-01), None
patent: 9-301948 (1997-11-01), None
patent: 2906999 (1999-06-01), None
patent: 00/17139 (2000-03-01), None
patent: 2000-314956 (2000-11-01), None
patent: 2000-336121 (2000-12-01), None
patent: 2001-240571 (2001-09-01), None
patent: 2002-72484 (2002-03-01), None
patent: 2002-179624 (2002-06-01), None
patent: 2003-40840 (2003-02-01), None
patent: 2003-66612 (2003-03-01), None
patent: 2003-192729 (2003-07-01), None
patent: 2004-46098 (2004-02-01), None
patent: 2005-239710 (2005-09-01), None
patent: WO 2004/074242 (2004-09-01), None
Japanese Office Action dated Feb. 17, 2010, issued in corresponding Japanese Patent Application No. 2006-022319.
European search report dated Aug. 9, 2007, issued in corresponding European Patent application No. 07250422.8.
Soai et al., Sodium Borohydride-T-Butyl Alcohol-Methanol as an Efficient System for the Selective Reduction of Esters, 1982, pp. 463-467, vol. 12, Synthetic Communications, Philadelphia, PA, US.
Database Beilstein, Beilstein Institute for Organic Chemistry, J. Chem. Soc., 1951, pp. 3067-3069.
Koji Arimitsu et al.; “Sensitivity Enhancement of Chemical-Amplification-Type Photoimaging Materials by Acetoacetic Acid Derivatives”; Journal of Photopolymer Science and Technology, vol. 8, No. 1, pp. 43-44, 1995.
Kazuaki Kudo et al.; “Enhancement of the Senesitivity of Chemical-Amplification-Type Photoimaging Materials by β-Tosyloxyketone Acetals”; Journal of Photopolymer Science and Technology, vol. 8, No. 1, pp. 45-46, 1995.
Koji Arimitsu et al.; “Effect of Phenolic Hydroxyl Residues on the Improvement of Acid-Proliferation-Type Photoimaging Materials”; Journal of Photopolymer Science and Technology, vol. 9, No. 1, pp. 29-30, 1996.
Soichi Owa et al.; “Immersion lithography; its potential performance and issues”; Optical Microlithograpy XVI, Proceedings of SPIE, vol. 5040, p. 724, 2003.
Taku Hirayama “Resist and Cover Material Investigation for Immersion Lithograph”, 2nd. Immersion Workshop, Jul. 11, 2003.
Shinichi Kanna et al.; “Study and Control of the Interfacial Mass Transfer of Resist Components in 193 nm Immersion Lithography”, Journal of Photopolymer Science and Technology, vol. 18, No. 5, p. 603, 2005.

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