Fluid pressure imprint lithography

Details Fluid pressure imprint lithography Fluid pressure imprint lithography

2006-11-21

2006-11-21

Del Sole, Joseph S. (Department: 1722)

Plastic article or earthenware shaping or treating: apparatus

Means to create a vacuum or apply fluid pressure within a...

C425S405200, C425S387100, C425S389000

Reexamination Certificate

active

07137803

ABSTRACT:
An improved method of imprint lithography involves using direct fluid pressure to press the mold into a substrate-supported film. Advantageously the mold and/or substrate are sufficiently flexible to provide wide area contact under the fluid pressure. Fluid pressing can be accomplished by sealing the mold against the film and disposing the resulting assembly in a pressurized chamber. It can also be accomplished by subjecting the mold to jets of pressurized fluid. The result of this fluid pressing is enhanced resolution and high uniformity over an enlarged area.

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