Data processing: structural design – modeling – simulation – and em – Simulating electronic device or electrical system
Reexamination Certificate
2006-11-14
2006-11-14
Phan, Thai (Department: 2128)
Data processing: structural design, modeling, simulation, and em
Simulating electronic device or electrical system
C703S014000, C703S015000, C703S016000, C703S017000
Reexamination Certificate
active
07136796
ABSTRACT:
An exemplary method and system for generating integrated circuit (IC) simulation information regarding the effect of design and fabrication process decisionn includes creating and using a data store of profile-based information comprising metrology signal, structure profile data, process control parameters, and IC simulation attributes.An exemplary method and system for generating a simulation data store using signals off test gratings that model the effect of an IC design and/or fabrication process includes creating and using a simulation data store generated using test gratings that model the geometries of the IC interconnects. The interconnect simulation data store may be used in-line for monitoring electrical and thermal properties of an IC device during fabrication. Other embodiments include utilizing a metrology simulator and various combinations of a fabrication process simulator, a device simulator, and/or circuit simulator.
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Bao Junwei
Jakatdar Nickhil
Niu Xinhui
Day Herng-der
Phan Thai
Timbre Technologies, Inc.
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