Fluid jet electric discharge source

Details Fluid jet electric discharge source Fluid jet electric discharge source

2006-04-25

2006-04-25

Pham, Hai (Department: 2853)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S292000, C250S492210

Reexamination Certificate

active

07034322

ABSTRACT:
A fluid jet or filament source and a pair of coaxial high voltage electrodes, in combination, comprise an electrical discharge system to produce radiation and, in particular, EUV radiation. The fluid jet source is composed of at least two serially connected reservoirs, a first reservoir into which a fluid, that can be either a liquid or a gas, can be fed at some pressure higher than atmospheric and a second reservoir maintained at a lower pressure than the first. The fluid is allowed to expand through an aperture into a high vacuum region between a pair of coaxial electrodes. This second expansion produces a narrow well-directed fluid jet whose size is dependent on the size and configuration of the apertures and the pressure used in the reservoir. At some time during the flow of the fluid filament, a high voltage pulse is applied to the electrodes to excite the fluid to form a plasma which provides the desired radiation; the wavelength of the radiation being determined by the composition of the fluid.

REFERENCES:
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patent: 6188076 (2001-02-01), Silfvast et al.
patent: 6452194 (2002-09-01), Bijkerk et al.

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