Fluid dispensing device for wet chemical process tank and method

Details Fluid dispensing device for wet chemical process tank and method Fluid dispensing device for wet chemical process tank and method

1996-11-21

1999-02-09

Breneman, R. Bruce

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

1341001, 134902, 222195, 239418, 239566, 216 92, 438748, B05C 100

Patent

active

058688986

ABSTRACT:
A wet chemical process tank for processing semiconductor wafers equipped with a specially designed fluid dispenser positioned at the bottom of the tank where the dispenser has a fluid dispensing member having an elongated body connected on at least one end to at least one support member for stabilizing the member and a fluid passage therein in fluid communication with a plurality of openings provided on at least one of the vertical sides of the member such that a fluid may only exit the member in a horizontal direction so that bubbles generated do not directly contact the semiconductor wafers suspended at the center of the tank.

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