Fluid bearing apparatus and method utilizing selective turntable

Details Fluid bearing apparatus and method utilizing selective turntable Fluid bearing apparatus and method utilizing selective turntable

1975-05-19

1976-04-06

Blunk, Evon C.

Cutlery

193 31R, 198 31R, 302 2R, B65G 5100

Patent

active

039485641

ABSTRACT:
Apparatus and method for handling articles, such as silicon and like wafers used in producing electronic devices. Articles are transferred between two predetermined stations on a fluid bearing track structure and may be selectively diverted in sequence into a storage magazine which defines a buffer station so that articles to be handled or treated in adjacent associated apparatus may be maintained in readily available supply to satisfy the needs of the associated apparatus. When such needs may be satisfied by direct transfer of articles into the associated apparatus the storage buffer zone is bypassed. A selectively actuated fluid bearing turntable directs articles into or from the storage magazine as operating conditions require. All handling of articles is automatically effected on fluid bearings and requires no direct manual participation.

REFERENCES:
patent: 3567002 (1971-03-01), Russ
patent: 3645581 (1972-02-01), Lasch et al.
patent: 3718371 (1973-02-01), Lasch
patent: 3730595 (1973-05-01), Yakubowski

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