Flow sensor having thin film portion and method for...

Measuring and testing – Volume or rate of flow – Thermal type

Reexamination Certificate

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Details

C073S204250, C073S204260, C073S281000

Reexamination Certificate

active

06983653

ABSTRACT:
A flow sensor for detecting flow of fluid includes a thin film portion. The thin film portion has a heater and a detector for detecting temperature around the heater. The heater is made of semiconductor. This flow sensor has high sensor sensitivity with low energy consumption. Further, the sensor has high detection accuracy, and the thin film portion has high endurance. Furthermore, the flow sensor with a passivation film has appropriate thickness so as to improve strength of a thin film portion.

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patent: 2002-48616 (2002-02-01), None
patent: 2002-71416 (2002-03-01), None

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