Measuring and testing – Volume or rate of flow – Thermal type
Reexamination Certificate
2006-01-10
2006-01-10
Noori, Max (Department: 2855)
Measuring and testing
Volume or rate of flow
Thermal type
C073S204250, C073S204260, C073S281000
Reexamination Certificate
active
06983653
ABSTRACT:
A flow sensor for detecting flow of fluid includes a thin film portion. The thin film portion has a heater and a detector for detecting temperature around the heater. The heater is made of semiconductor. This flow sensor has high sensor sensitivity with low energy consumption. Further, the sensor has high detection accuracy, and the thin film portion has high endurance. Furthermore, the flow sensor with a passivation film has appropriate thickness so as to improve strength of a thin film portion.
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Abe Ryuuichirou
Isomura Kiyokazu
Iwaki Takao
Mizutani Tomoyuki
Teshigahara Akihiko
DENSO Corporation
Jenkins Jermaine
Noori Max
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