Flow diffuser to be used in electro-chemical plating system

Chemistry: electrical and wave energy – Apparatus – Electrolytic

Reexamination Certificate

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C204S273000

Reexamination Certificate

active

07427338

ABSTRACT:
An apparatus comprising an electrolyte cell, an anode, and a porous rigid diffuser. The electrolyte cell is configured to receive a substrate to have a metal film deposited thereon. An anode is contained within the electrolyte cell. A porous rigid diffuser is connected to the electrolyte cell and extends across the electrolyte cell. The diffuser is positioned between a location that the substrate is to be positioned when the metal film is deposited thereon and the anode.

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