Flow diffuser to be used in electro-chemical plating system

Details Flow diffuser to be used in electro-chemical plating system Flow diffuser to be used in electro-chemical plating system

2003-06-30

2008-09-23

Wilkins, III, Harry D (Department: 1795)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S273000

Reexamination Certificate

active

07427338

ABSTRACT:
An apparatus comprising an electrolyte cell, an anode, and a porous rigid diffuser. The electrolyte cell is configured to receive a substrate to have a metal film deposited thereon. An anode is contained within the electrolyte cell. A porous rigid diffuser is connected to the electrolyte cell and extends across the electrolyte cell. The diffuser is positioned between a location that the substrate is to be positioned when the metal film is deposited thereon and the anode.

REFERENCES:
patent: 2882209 (1959-04-01), Brown et al.
patent: 3407574 (1968-10-01), Perkins, Jr. et al.
patent: 4120711 (1978-10-01), Gudeman
patent: 4304641 (1981-12-01), Grandia et al.
patent: 4466864 (1984-08-01), Bacon et al.
patent: 5512163 (1996-04-01), Warfield
patent: 5605615 (1997-02-01), Goolsby et al.
patent: 5883017 (1999-03-01), Tepman et al.
patent: 5883762 (1999-03-01), Calhoun et al.
patent: 6027631 (2000-02-01), Broadbent
patent: 6103085 (2000-08-01), Woo et al.
patent: 6231743 (2001-05-01), Etherington
patent: 6254742 (2001-07-01), Hanson et al.
patent: 6261433 (2001-07-01), Landau
patent: 2004/0026255 (2004-02-01), Kovarsky et al.
patent: 0 903 774 (1999-03-01), None
patent: 1 037 263 (2000-09-01), None
patent: 1 067 590 (2001-10-01), None
patent: 1 167 583 (2002-01-01), None
patent: 1 179 618 (2002-02-01), None
patent: 407014811 (1995-01-01), None
patent: WO 00/03067 (2000-01-01), None
patent: WO 00/32835 (2000-06-01), None
patent: WO 00/32848 (2000-06-01), None
patent: WO 02/04715 (2002-01-01), None
PCT International Search Report for PCT/US01/20625, dated Jun. 15, 2004.
PCT International Search Report for PCT/US01/28655, dated Oct. 28, 2004.
PCT International Search Report for PCT/US01/28352, dated Nov. 16, 2004.
PCT International Search Report dated Jul. 5, 2005, for PCT/US01/31943.
PCT International Search Report dated Jul. 5, 2005, for PCT/US01/20622.
PCT Written Opinion for International Application No. PCT/US01/20624 dated Aug. 8, 2006.
PCT Notification of Transmittal of International Preliminary Examination Report dated Apr. 13, 2007 for PCT/US01/31943. (APPM/002601PCT12).

Affiliated with

Also associated with

Rating

Flow diffuser to be used in electro-chemical plating system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Flow diffuser to be used in electro-chemical plating system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Flow diffuser to be used in electro-chemical plating system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3973950