Floating slit valve for transfer chamber interface

Details Floating slit valve for transfer chamber interface Floating slit valve for transfer chamber interface

2011-08-02

2011-08-02

Fristoe, Jr., John (Department: 3753)

Valves and valve actuation

Reciprocating valve

Gate

C251S301000, C251S326000

Reexamination Certificate

active

07988129

ABSTRACT:
The present invention generally comprises a floating slit valve for interfacing with a chamber. A floating slit valve moves or “floats” relative to another object such as a chamber. The slit valve may be coupled between two chambers. When a chamber coupled with the slit valve is heated, the slit valve may also be heated by conduction. As the slit valve is heated, it may thermally expand. When a vacuum is drawn in a chamber, the slit valve may deform due to vacuum deflection. By disposing a low friction material spacer between the chamber and the slit valve, the slit valve may not rub against the chamber during thermal expansion/contraction and/or vacuum deflection and thus, may not generate undesirable particle contaminants. Additionally, slots drilled through the chamber for coupling the slit valve to the chamber may be sized to accommodate thermal expansion/contraction and vacuum deflection of the slit valve.

REFERENCES:
patent: 5857368 (1999-01-01), Grunes et al.
patent: 5985033 (1999-11-01), Yudovsky et al.
patent: 6024393 (2000-02-01), Shamlou et al.
patent: 6045620 (2000-04-01), Tepman et al.
patent: 6063440 (2000-05-01), Chen et al.
patent: 6092981 (2000-07-01), Pfeiffer et al.
patent: 6108189 (2000-08-01), Weldon et al.
patent: 6143086 (2000-11-01), Tepman
patent: 6199927 (2001-03-01), Shamlou et al.
patent: 6231732 (2001-05-01), Hollars et al.
patent: 6248176 (2001-06-01), Yudovsky et al.
patent: 6294088 (2001-09-01), Allington et al.
patent: 6414834 (2002-07-01), Weldon et al.
patent: 6436192 (2002-08-01), Chen et al.
patent: 6721162 (2004-04-01), Weldon et al.
patent: 2005/0109461 (2005-05-01), Sun
patent: 2006/0051966 (2006-03-01), Or et al.
patent: 2006/0264043 (2006-11-01), Stewart et al.
International Search Report and Written Opinion dated Aug. 8, 2008 for International Application No. PCT/US2008/055448.

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