Semiconductor device manufacturing: process – With measuring or testing – Packaging or treatment of packaged semiconductor
Reexamination Certificate
2009-03-12
2010-12-21
Lebentritt, Michael S (Department: 2829)
Semiconductor device manufacturing: process
With measuring or testing
Packaging or treatment of packaged semiconductor
C438S019000, C438S029000, C438S034000, C257SE21001, C257SE21012, C257SE21121, C257SE21141, C257SE21586
Reexamination Certificate
active
07855087
ABSTRACT:
This sheet production apparatus comprises a vessel defining a channel configured to hold a melt. The melt is configured to flow from a first point to a second point of the channel. A cooling plate is disposed proximate the melt and is configured to form a sheet on the melt. A spillway is disposed at the second point of the channel. This spillway is configured to separate the sheet from the melt.
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Kellerman Peter L.
Sinclair Frank
Lebentritt Michael S
Varian Semiconductor Equipment Associates Inc.
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