Flip-over alignment station for probe needle adjustment

Details Flip-over alignment station for probe needle adjustment Flip-over alignment station for probe needle adjustment

2005-03-08

2005-03-08

Pert, Evan (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S756010, C324S1540PB

Reexamination Certificate

active

06864697

ABSTRACT:
An alignment station for aligning probe needles on a probe card prior to testing of integrated circuits on a wafer. The alignment station includes a probe card support or chuck for receiving a probe card and mask carrier arms which support a needle alignment mask and are operable to selectively place the mask into contact with the probe needles and raise the mask out of contact with the probe needles.

REFERENCES:
patent: 5479109 (1995-12-01), Lau et al.
patent: 6002426 (1999-12-01), Back et al.
patent: 6025729 (2000-02-01), Van Loan et al.
patent: 6429671 (2002-08-01), Duckworth et al.

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