Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Reexamination Certificate
2005-10-11
2005-10-11
Deo, Duy-Vu N. (Department: 1765)
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Including dielectric isolation means
C257S664000, C257S738000, C257S792000, C438S053000, C438S113000
Reexamination Certificate
active
06953982
ABSTRACT:
A flexible skin formed of silicon islands encapsulated in a polyimide film. The silicon islands preferably include a MEMS device and are connected together by a polyimide film (preferably about 1–100 μm thick). To create the silicon islands, silicon wafers are etched to a desirable thickness (preferably about 10–500 μm) by Si wet etching and then patterned from the back side by reactive ion etching (RIE).
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Ho Chihming
Jiang Fukang
Tai Yu-Chong
California Institute of Technology
Deo Duy-Vu N.
Fish & Richardson P.C.
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