Flexible polishing fluid delivery system

Details Flexible polishing fluid delivery system Flexible polishing fluid delivery system

2006-08-08

2006-08-08

Wilson, Lee D. (Department: 3723)

Abrading

Abrading process

Utilizing fluent abradant

C451S036000, C451S041000

Reexamination Certificate

active

07086933

ABSTRACT:
A method and apparatus for delivering a polishing fluid to a chemical mechanical polishing surface is provided. In one embodiment, an apparatus for delivering a polishing fluid to a chemical mechanical polishing surface includes an arm having a plurality of holes formed in the arm for retaining a plurality of polishing fluid delivery tubes. Each of the tubes are disposed through one of the holes and coupled to the arm. The number of holes exceeds the number of tubes, thereby allowing the distribution of polishing fluid to a polishing surface and correspondingly the local polishing rates across a diameter of a substrate being polished to be controlled.

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