Flexible membrane for multi-chamber carrier head

Details Flexible membrane for multi-chamber carrier head Flexible membrane for multi-chamber carrier head

2007-04-03

2007-04-03

Nguyen, Dung Van (Department: 3723)

Abrading

Machine

Rotary tool

C451S398000

Reexamination Certificate

active

11321006

ABSTRACT:
A flexible membrane for use with a carrier head of a substrate chemical mechanical polishing apparatus has a central portion with an outer surface providing a substrate receiving surface, a perimeter portion for connecting the central portion to a base of the carrier head, and at least one flap extending from an inner surface of the central portion. The flap includes a laterally extending first section and a vertically extending second section connecting the laterally extending first section to the central portion.

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Zuniga et al., “Carrier Head with Multiple Chambers”, U.S. Appl. No. 11/245,867, filed Oct. 6, 2005, 28 pp.

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