Flexible manifold for integrated gas system gas panels

Details Flexible manifold for integrated gas system gas panels Flexible manifold for integrated gas system gas panels

2007-06-11

2010-10-05

Fox, John (Department: 3753)

Fluid handling

Systems

With flow control means for branched passages

Reexamination Certificate

active

07806143

ABSTRACT:
A flexible gas delivery apparatus having a gas panel with a first extension block having a first section and second section, the first section positioned between a mixing valve and the substrate having an exit port in fluid communication with a pump/purge manifold, and a second extension block having a first section and a second section, the first section positioned between a purge valve and the substrate having a discharge port in fluid communication with a mixing manifold, wherein the second portion of the first and second extension blocks extend outwardly from the gas panel.

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