Flexible hybrid defect classification for semiconductor...

Details Flexible hybrid defect classification for semiconductor... Flexible hybrid defect classification for semiconductor...

2006-11-28

2006-11-28

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Electrical signal parameter measurement system

Reexamination Certificate

active

07142992

ABSTRACT:
Hybrid methods for classifying defects in semiconductor manufacturing are provided. The methods include applying a flexible sequence of rules for defects to inspection data. The sequence of rules includes deterministic rules, statistical rules, hybrid rules, or some combination thereof. The rules included in the sequence may be selected by a user using a graphical interface. The method also includes classifying the defects based on results of applying the sequence of rules to the inspection data.

REFERENCES:
patent: 5544256 (1996-08-01), Brecher et al.
patent: 5822218 (1998-10-01), Moosa et al.
patent: 6092059 (2000-07-01), Straforini
patent: 6222936 (2001-04-01), Phan et al.
patent: 6256093 (2001-07-01), Ravid et al.
patent: 6473851 (2002-10-01), Plutowski
patent: 6483938 (2002-11-01), Hennessey et al.
patent: 6598210 (2003-07-01), Miwa
patent: 6661515 (2003-12-01), Worster et al.
International Search Report, PCT/US05/35357, mailed Jan. 24, 2006.

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