Optics: measuring and testing – Of light reflection
Reexamination Certificate
2006-12-26
2006-12-26
Stafira, Michael P. (Department: 2877)
Optics: measuring and testing
Of light reflection
Reexamination Certificate
active
07154607
ABSTRACT:
A flat spectrum illumination source for use in optical metrology systems includes a first light source generating a visible light beam and a second light source generating an ultraviolet light beam. The illumination source also includes an auxiliary light source generating a light beam at wavelengths between the visible light beam and the ultraviolet light beam. The three light beams are combined to provide a broadband probe beam that has substantially even illumination levels across a broad range of wavelengths. Alternately, the illumination source may be fabricated as an array of light emitting diodes selected to cover a range of separate wavelengths. The outputs of the LED array are combined to produce the broadband probe beam.
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Aikens David M.
Hendrix James Lee
Ng Joel
Rotter Lawrence
Wang David Y.
Stafira Michael P.
Stallman & Pollock LLP
Therma-Wave, Inc.
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