Flat coil and lithographic method for producing microcomponents

Details Flat coil and lithographic method for producing microcomponents Flat coil and lithographic method for producing microcomponents

2006-05-09

2006-05-09

Barreca, Nicole (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S311000, C430S313000, C430S320000

Reexamination Certificate

active

07041433

ABSTRACT:
The invention relates to a flat coil and to a lthographic method for producing microcomponents with metal component sources in the sub-millimeter range. According to the inventive method, a resist material is structured by means of selective exposition and removing the unexposed zones and filling in the gaps between the resist structures with metal by means of a galvanic method to produe the metal component structures. The aim of the invention is to improve such a method so that the microcomponents can be subdivided during said process. To this end, a structured three-dimensional sacrificial metal layer is produced during the production of the microcomponent, said sacrificial layer delimiting the microcomponent and being removed once the microcomponent is due to be subdivided. The invention also relates to a method for producing microcomponents with component structures of cross-linkable resist material and to a flat coil for micromotors with at least one coil layer with strip conductors in the sub-millimeter range.

REFERENCES:
patent: 5149397 (1992-09-01), Bol
patent: 5190637 (1993-03-01), Guckel
patent: 5646464 (1997-07-01), Sickafus
patent: 5877924 (1999-03-01), Saito
patent: 6131880 (2000-10-01), Hahn et al.
patent: 41 05 999 (1992-06-01), None
patent: 37 27 142 (1994-02-01), None
patent: 44 00 315 (1995-01-01), None
patent: 44 32 725 (1996-01-01), None
patent: 197 03 080 (1998-07-01), None
patent: 0 592 094 (1994-04-01), None
patent: 0 607 680 (1994-07-01), None
patent: 0 851 295 (1998-07-01), None
patent: 10-148644 (1998-02-01), None
patent: WO 96/08749 (1996-03-01), None
English translation of WO 96/08749, “Method for Producing A Three-Dimensional Component or Group of Components,” M. Rothe et al., Mar. 1996.
Proc. SPIE vol. 3680B-65 Paris, France, Mar. 30 through Apr. 1, 1999 “Micromachining and Microfabrication”, title “Design and realization of a penny-shaped micromotor” by M. Nienhaus et al.
SU-8 Resistmaterial (Shell Chemical commercial name), which is a cross-linkable polymer that is described in J. Micromechanics, Microengineering 7(1997), pp. 121-124.
Japanese Abstract, No. 0008074099 AA, Published Mar. 19, 1996 “Structural Body Having Mechanical Element and Moving Part and Its Production”.

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