Flash memories and methods of fabricating the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S316000

Reexamination Certificate

active

10915892

ABSTRACT:
The present disclosure relates to a flash memory including a common source line having a predetermined width formed on a semiconductor substrate, a common source in the semiconductor substrate below the common source line, and a couple of floating gates having a predetermined width formed on both outer side walls of the common source line. The flash memory may also include a couple of tunneling oxide layers formed between the floating gate and the common source line, and between the floating gate and the semiconductor substrate, a couple of dielectric layers formed on each of the couple of floating gates, and a couple of control gates formed on each of the couple of dielectric layers. Further, the flash memory may include a couple of drains formed in the semiconductor substrate by injecting impurity ions in using the control gate and the common source line as a mask.

REFERENCES:
patent: 5950087 (1999-09-01), Hsieh et al.
patent: 5989960 (1999-11-01), Fukase
patent: 6151248 (2000-11-01), Harari et al.
patent: 6204126 (2001-03-01), Hsieh et al.
patent: 6528843 (2003-03-01), Wu
patent: 6570213 (2003-05-01), Wu
patent: 10-2002-0045434 (2002-06-01), None

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