Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1988-05-09
1990-11-20
Willis, Davis L.
Optics: measuring and testing
By polarized light examination
With light attenuation
250572, G01B 1124
Patent
active
049714457
ABSTRACT:
A fine surface profile meter includes an X-Y stage, supported by a leaf spring, for supporting a sample thereon, a piezoelectric actuator for two-dimensionally scanning the X-Y stage, a positioning table, disposed below the X-Y stage, for positioning the X-Y stage at an arbitrary position, an objective lens disposed above the X-Y stage, an observation optical system for allowing an operator to observe an enlarged sample image, a measurement optical system, an optical axis of which is aligned with an optical path of the objective lens through a beam splitter, the measurement optical system for emitting a laser beam onto the sample through the objective lens and to receive the laser beam reflected by the sample, a calculator circuit for calculating height information of the sample using an output from the measurement optical system and for obtaining a two-dimensional distribution of the height information, a cover for shielding the X-Y stage, the positioning means, the objective lens, the beam splitter, the observation optical system, and the measurement optical system from an outer atmosphere, a detachable measurement unit for integrally holding the objective lens, the beam splitter, and the measurement optical system, a supporting plate supported on the X-Y stage through columns, and an arm, mounted on the supporting plate, for supporting the measurement optical system and the observation optical system.
REFERENCES:
patent: 4615621 (1986-10-01), Allen et al.
patent: 4689491 (1987-08-01), Lindow et al.
patent: 4726685 (1988-02-01), Kobayashi et al.
patent: 4732485 (1988-03-01), Morita et al.
"Thick Film Hybrid Inspection with a Computer-Controlled High Resolution Imaging and Storage System", SPIE, vol. 220, Arlan et al., 1980, pp. 130-139.
Kobayashi Shohei
Koshiishi Kiyozo
Kubo Mitunori
Morita Terumasa
Nagano Chikara
Olympus Optical Co,. Ltd.
Turner S. A.
Willis Davis L.
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