Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1992-06-29
1993-12-14
Rosenberger, Richard A.
Optics: measuring and testing
By polarized light examination
With light attenuation
356386, 356237, 356446, G01B 1102
Patent
active
052707946
ABSTRACT:
In an apparatus and a method for evaluating the pattern structure of a fine structure, the presence of foreign particles, or the like, an object having a fine structure is scanned with a light beam, or the spot size of the light beam projected onto the object is changed, and extreme values in light scattered by the object are detected. The fine structure is evaluated according to changes in the positions, the number, the intensities or the like of the extreme values, that is, according to distribution characteristics of the extreme values caused by the scanning or the changes in the spot size of the light beam.
REFERENCES:
patent: 3782834 (1974-01-01), Fujimori et al.
patent: 4479717 (1984-10-01), Cornillault
patent: 4579453 (1986-04-01), Makita
patent: 4632557 (1986-12-01), Thompson
patent: 4728196 (1988-03-01), Gerstorfer
patent: 4827141 (1989-05-01), Zwirn
patent: 4859062 (1989-08-01), Thurn et al.
Patent Abstracts of Japan, Kokai No. 58-033107, vol. 7, No. 113, May 1983.
Patent Abstracts of Japan, Kokai No. 63-225110, vol. 13, No. 27, Jan. 1989.
"Method For Microscopic Edge Detection," IBM Technical Disclosure Bulletin, vol. 32, No. 3B, Aug. 1989, pp. 209 and 210.
Saito Kenji
Tsuji Toshihiko
Canon Kabushiki Kaisha
Rosenberger Richard A.
LandOfFree
Fine structure evaluation apparatus and method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Fine structure evaluation apparatus and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fine structure evaluation apparatus and method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1709853