Fine scanning mechanism for atomic force microscope

Details Fine scanning mechanism for atomic force microscope Fine scanning mechanism for atomic force microscope

1991-04-15

1992-04-21

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

73105, H01J 3726

Patent

active

051071142

ABSTRACT:
A fine scanning mechanism for an atomic force microscope includes a three-dimensionally displaceable cylindrical piezolectric element, a first probe attaching portion attached to an end of the said cylindrical piezoelectric element, a first probe attached to the first probe attaching portion, a bimorph piezoelectric element attaching portion attached to the end of the cylindrical piezoelectric element, a one-dimensionally displaceable bimorph piezoelectric element attached to the bimorph piezoelectric element attaching portion, a cantilever attaching portion attached to a side of the one-dimensionally displaceable bimorph piezoelectric element, the cantilever having a displacement portion and being attached to the cantilever attaching portion, a second probe attaching portion attached to a side of the displacement portion of the cantilever, a second probe attached to the second probe attaching portion, and a stationary sample tray disposed opposite the second probe.

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