Fine positioning device, as for the stage of a scanning tunnelin

Details Fine positioning device, as for the stage of a scanning tunnelin Fine positioning device, as for the stage of a scanning tunnelin

1990-06-12

1991-09-24

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

2504401, G21K 510

Patent

active

050515942

ABSTRACT:
A fine positioning device such as a stage device for placing a probe or a sample thereon in a scanning tunneling microscope comprises a fixed member, a first structure spring stage having a first base member integral with the fixed member, a first moving member and a first resilient member for resiliently coupling the first base member and the first moving member such that they are displaceable relative to each other in a predetermined direction, a first actuator for displacing the first moving member relative to the base member in the predetermined direction, a second structure spring stage having a second base member integral with the first moving member, a second moving member and a second resilient member for resilient coupling the second base member and the second moving member such that they are displaceable relative to each other in a direction parallel to the predetermined direction, and a second actuator for displacing the second moving member relative to the second base member in the parallel direction.

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Monthly Magazine "Sensor Technology" Dec., p. 4, Nov. 11, 1987.
News Paper, Agency of Industrial Science of Technology, vol. 35, No. 11, pp. 3-15, Nov. 1987.
Monthly Magazine "Machine Design" Dec., p. 4, Dec. 1, 1987.
Monthly Magazine "MOL" Feb., pp. 54-55, Feb. 1, 1988.

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