Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Reexamination Certificate
2007-03-27
2007-03-27
Wells, Nikita (Department: 2881)
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
C250S306000, C250S227110, C257S256000
Reexamination Certificate
active
11147562
ABSTRACT:
Disclosed is a fine pattern forming apparatus and a fine pattern inspecting apparatus. In one preferred form, the fine pattern forming apparatus includes a surface irregularity information reading device for detecting a shape signal corresponding to a surface irregularity of a surface of an original, while scanning the surface by use of a first probe, and a surface irregularity information writing device for processing a substrate to be processed, while scanning a surface of the substrate by use of a second probe, wherein an applied electric voltage to the second probe is changed in accordance with the shape signal while a distance between the second probe and the substrate is kept substantially constant, or the distance between the second probe and the substrate is changed in accordance with the shape signal while the applied electric voltage to the second probe is kept substantially constant, such that the substrate is processed in accordance with the surface irregularity of the original.
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Kasumi Kazuyuki
Kawakami Eigo
Nakamura Takashi
Ota Hirohisa
Tokita Toshinobu
Canon Kabushiki Kaisha
Morgan & Finnegan , LLP
Smith II Johnnie L
Wells Nikita
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