Fine particle collector trap for vacuum evacuating system

Details Fine particle collector trap for vacuum evacuating system Fine particle collector trap for vacuum evacuating system

1988-04-18

1989-03-28

Nozick, Bernard

Gas separation

With nonliquid cleaning means for separating media

Solid agent cleaning member movingly contacts apparatus

55269, 204164, B01D 5322

Patent

active

048160466

ABSTRACT:
A particle collector trap for a vacuum evacuating system wherein there is provided a vessel formed of a double-wall cylinder and having an inlet conduit connected to a vacuum processing chamber and an outlet conduit connected to at least one vacuum pump, a passage for flowing gas is defined between the double walls of the vessel, and one of the double walls is heated and other wall is cooled so as to maintain a predetermined temperature difference therebetween.

REFERENCES:
patent: 2268134 (1941-12-01), Clusius

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