Gas separation – With nonliquid cleaning means for separating media – Solid agent cleaning member movingly contacts apparatus
Patent
1988-04-18
1989-03-28
Nozick, Bernard
Gas separation
With nonliquid cleaning means for separating media
Solid agent cleaning member movingly contacts apparatus
55269, 204164, B01D 5322
Patent
active
048160466
ABSTRACT:
A particle collector trap for a vacuum evacuating system wherein there is provided a vessel formed of a double-wall cylinder and having an inlet conduit connected to a vacuum processing chamber and an outlet conduit connected to at least one vacuum pump, a passage for flowing gas is defined between the double walls of the vessel, and one of the double walls is heated and other wall is cooled so as to maintain a predetermined temperature difference therebetween.
REFERENCES:
patent: 2268134 (1941-12-01), Clusius
Maeba Yoshiyasu
Naruse Humio
Toyoda Satoru
Nihon Shinku Gijutsu Kabushiki Kaisha
Nozick Bernard
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