4. Gas separation
  5. With nonliquid cleaning means for separating media
  6. Solid agent cleaning member movingly contacts apparatus

Satoru Toyoda

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Fine particle collector trap for vacuum evacuating system

Gas separation – With nonliquid cleaning means for separating media – Solid agent cleaning member movingly contacts apparatus
Patent

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Sputtering apparatus for filling pores of a circular substrate

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1597616

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