Fine-line die and method of making same

Details Fine-line die and method of making same Fine-line die and method of making same

1984-03-16

1985-02-05

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566591, 1566611, 156905, 156515, 430306, C23F 102, B44C 122, C03C 1500, C03C 2506

Patent

active

044976860

ABSTRACT:
A method for fabricating a precision die having a line-and-space array by chemical milling the working face of an etchable workpiece to form a plurality of raised die elements separated and bounded by a plurality of cavities, including separating cavities and background cavities, is comprised of the steps of forming an etchant-resistant surface pattern of pockets penetrating slightly into the working face of the workpiece and at least partially overlapping and substantially conforming to the spatial disposition of a desired configuration for the die elements to be produced, and then selectively etching the workpiece in etchant-active regions intermediate and outwardly bounded by the pockets to undercut the same and form at least the conformation of the separating/background cavities within the working face. The step of forming the etchant-resistant pattern of pockets is preferably a two-stage procedure comprised of first chemical milling shallow pockets in the workpiece in the desired pattern and then loading those pockets with an etchant-resistant fill extending in an oversized pattern with respect to the surface width dimension of the die elements. The workpiece is selectively milled in the etchant-active regions to form cavity precursors having a surface width dimension approximately equal to the desired width for the spaces in the finished die; followed by selectively milling the regions intermediate those cavities to establish raised die elements conforming to the line array of the finished die.

REFERENCES:
patent: 4437924 (1984-03-01), Weglin
patent: 4447286 (1984-05-01), Weglin

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