Fine adjustment mechanism for a scanning tunneling microscope

Details Fine adjustment mechanism for a scanning tunneling microscope Fine adjustment mechanism for a scanning tunneling microscope

1988-08-09

1989-11-14

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250423F, H01J 3704

Patent

active

048809756

ABSTRACT:
A fine adjustment mechanism for a scanning tunneling microscope includes a mounting member, a cylindrical piezoelectric element fixed to the mounting member at one end thereof, an electrode provided on each of the inner and outer walls of the piezoelectric element, a probe provided on the other end of the piezoelectric element in such a manner that it extends outward on the central axis of the piezoelectric element, an electrically conductive member provided on the central axis of the piezoelectric element, one end of the conductive member being electrically connected to the probe within the piezoelectric element and the other end thereof extending to the outside of the piezoelectric element through the side of the piezoelectric element at which it is fixed to the mounting member, and shielding member provided on the outer periphery of the conductive member for electrically shielding the conductive member.

REFERENCES:
patent: 4785177 (1988-11-01), Besocke
Binnig et al., "Single-Tube Three-Dimensional Scanner for Scanning Tunneling Microscopy" Rev. Sci. Instrm., vol. 57, pp. 1688-1699 (1986).
K. Besocke, "An Easily Operable Scanning Tunneling Microscope" Surface Science, vol. 181, pp. 145-153 (1987).

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