Fine adjustment mechanism for a scanning tunneling microscope

Radiant energy – Inspection of solids or liquids by charged particles

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250423F, H01J 3700

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049452355

ABSTRACT:
A fine adjustment mechanism for a scanning tunneling microscope includes a mounting member, a cylindrical piezoelectric element fixed to the mounting member at one end of the element, a probe provided at the other end of the piezoelectric element, and electrodes disposed on the inner and outer walls of the piezoelectric element, one of the electrodes being divided into a plurality of electrode groups in the longitudinal direction of the piezoelectric element.

REFERENCES:
patent: 4785177 (1988-11-01), Besocke
Binnig et al., "Single-Tube Three-Dimensional Scanner for Scanning Tunneling Microscopy", Rev. Sci. Instrum., vol. 57, pp. 1688-1689 (1986).
K. Besocke, "An Easily Operable Scanning Tunneling Microscrope", Surface Science, vol. 181, pp. 145-153 (1987).

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