Fin-shaped capacitor

Details Fin-shaped capacitor Fin-shaped capacitor

1998-05-26

2000-06-20

Kincaid, Kristine

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361305, 361311, 257308, 257310, 438396, 438240, 438253, H01G 4005, H01L 2120

Patent

active

060784938

ABSTRACT:
A capacitor includes a first electrode in which a first material layer composed of a conductive oxide and a second material layer formed of a conductive material are alternately stacked. The side surface of the second material layer is recessed to form a fin-shaped structure and the second material layer is etched to have a width shorter than that of the first material layer. The capacitor also includes a second electrode and a dielectric material formed between the first electrode and the second electrode.

REFERENCES:
patent: 4700457 (1987-10-01), Matsukawa
patent: 5168073 (1992-12-01), Gonzalez et al.
patent: 5192703 (1993-03-01), Lee et al.
patent: 5416037 (1995-05-01), Sato et al.
patent: 5532182 (1996-07-01), Woo
patent: 5573967 (1996-11-01), Tseng
patent: 5656536 (1997-08-01), Wu

Affiliated with

Also associated with

Rating

Fin-shaped capacitor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fin-shaped capacitor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fin-shaped capacitor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1858573