Gas separation: processes – Solid sorption – Organic gas or liquid particle sorbed
Reexamination Certificate
2006-02-28
2009-06-02
Hopkins, Robert A (Department: 1797)
Gas separation: processes
Solid sorption
Organic gas or liquid particle sorbed
C095S286000, C095S287000, C096S413000, C096S417000, C055S385200, C055S482000, C055S484000
Reexamination Certificate
active
07540901
ABSTRACT:
A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.
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Goodwin William M.
Grayfer Anatoly
Kinkead Devon
Kishkovich Oleg P.
Ruede David
Entegris, Inc.
Hamilton Brook Smith & Reynolds P.C.
Hopkins Robert A
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