Filtered e-beam inspection and review

Details Filtered e-beam inspection and review Filtered e-beam inspection and review

2005-12-27

2005-12-27

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

Reexamination Certificate

active

06979824

ABSTRACT:
The disclosure relates to filtered e-beam inspection and review. One embodiment pertains to the filtered inspection or review of a specimen with a high aspect ratio feature. Advantageously, the energy and/or angular filtering improves the information retrievable relating to the high aspect ratio feature on the specimen. Another embodiment pertains to a method for energy-filtered electron beam inspection where a band-pass energy filtered image data is generated by determining the difference between a first high-pass energy-filtered image data set and a second high-pass energy-filtered image data set.

REFERENCES:
patent: 6038018 (2000-03-01), Yamazaki et al.
patent: 6232787 (2001-05-01), Lo et al.
patent: 6317514 (2001-11-01), Reinhorn et al.
patent: 6583414 (2003-06-01), Nozoe et al.

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