Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated...
Reexamination Certificate
2002-03-25
2004-08-17
Nelms, David (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
C257S506000, C257S508000, C257S501000, C257S491000, C438S218000, C438S219000, C438S257000, C438S294000
Reexamination Certificate
active
06777770
ABSTRACT:
TECHNICAL FIELD OF THE INVENTION
This invention relates generally to integrated circuits and, more particularly, to integrated circuit dielectrics useful for reducing the signal delay time attributable to interconnects.
BACKGROUND OF THE INVENTION
The semiconductor industry continuously strives to reduce the size and cost of integrated circuits. It is common in the semiconductor art to use layers of metal, polysilicon, or another conductor to conduct current between various semiconductor structures with an integrated circuit, and to external terminals for the integrated circuit, by means of conductive vias. One method for measuring the performance of an integrated circuit uses the maximum clock speed at which the circuit operates reliably, which depends on how fast transistors can be switched and how fast signals can propagate.
One particular problem confronting the semiconductor industry is that, as integrated circuit scaling continues, the performance improvement is limited by the signal delay time attributable to interconnects in the integrated circuit. That is, the capacitance at metal interconnects increases as the density of the integrated circuit increases. According to one definition, integrated circuit interconnects are three-dimensional metal lines with submicrometer cross sections surrounded by insulating material. One definition of an interconnect delay is the product of the interconnect resistance (R) and the parasitic capacitance (C) for the interconnect metal to the adjacent layers. Because of the progressive scaling, the parasitic capacitance (C) has significantly increased due to closer routing of wires, and the interconnect resistance (R) has significantly increased due to a continuous reduction of the wire section.
The following approximations for various generations of integrated circuit technology illustrates this problem. For example, the delay in 0.7 &mgr;m technology is about 500 ps, in which about 200 ps seconds are attributable to gate delays and about 300 ps are attributable to interconnect delays. The delay in 0.18 &mgr;m technology is about 230 ps, in which about 30 ps are attributable to gate delays and about 200 ps are attributable to interconnect delays. As integrated circuit scaling continues, it is desirable to lower the interconnect RC time constant by using metals with a high conductivity. One high conductivity metal used to lower the RC constant is copper. The use of copper in 0.18 &mgr;m technology improves the interconnect delays to about 170 ps. However, even though the delay attributable to the gates continues to decrease as scaling continues beyond the 0.18 &mgr;m technology, the overall delay increases significantly because the interconnect delay is significantly increased. It has been estimated that as much as 90 percent of the signal delay time in future integrated circuit designs may be attributable to the interconnects and only 10 percent of the signal delay may be attributable to transistor device delays. As such, it is desirable to lower the interconnect RC time constant by using materials with a low dielectric constant (k).
One direction for developing low-k dielectrics incorporates air into dielectrics to make them porous. The dielectric constant of the resulting porous material is a combination of the dielectric constant of air (k≈1) and the dielectric constant of the dielectric material. As such, it is possible to lower the dielectric constant of a low-k dense material by making the dielectric material porous. However, some methods for providing porous dielectric materials involve rather complex processing steps that are difficult to consistently perform, which increases the time and cost of processing.
Therefore, there is a need in the art to provide a system and method that improves integrated circuit performance by reducing the interconnect RC time constant. There is a need in the art to provide a low-k dielectric insulator for the interconnects that is easily and consistently prepared in a timely and cost-effective manner.
SUMMARY OF THE INVENTION
The above mentioned problems are addressed by the present subject matter and will be understood by reading and studying the following specification. The present subject matter provides a low-k dielectric insulator for integrated circuit interconnects that is easily and consistently prepared in a timely and cost-effective manner. The low-k dielectric insulator of the present invention is vapor deposited at predetermined angles of incidence with respect to a normal vector of a substrate surface so as to promote columnar growth that results in porous dielectric microstructures. Various parameters are capable of being manipulated to control the columnar morphology to achieve the desired dielectric characteristics. These parameters include deposition rate, deposition temperature, incident angle &thgr; of vapor flux, substrate rotation (angular position &phgr; and angular rate &ohgr;), and initial morphology of a patterned or modulated substrate surface. As such, the present invention provides a system and method that improves integrated circuit performance by reducing the interconnect RC time constant.
One aspect of the present subject matter is an integrated circuit insulator structure. One embodiment of the structure includes a vapor-deposited dielectric material. The dielectric material has a predetermined microstructure formed using a glancing angle deposition (GLAD) process. The microstructure includes columnar structures that provide a porous dielectric material.
One aspect of the present subject matter is a method of forming a low-k insulator structure. In one embodiment, a predetermined vapor flux incidence angle &thgr; is set with respect to a normal vector for a substrate surface so as to promote a dielectric microstructure with individual columnar structures. Vapor deposition and substrate motion are coordinated so as to form columnar structures in a predetermined shape.
These and other aspects, embodiments, advantages, and features will become apparent from the following description of the invention and the referenced drawings.
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Ahn Kie Y.
Forbes Leonard
Micro)n Technology, Inc.
Schwegman Lundberg Woessner & Kluth P.A.
Tran Long
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