Film removal by chemical transformation and aerosol clean

Details Film removal by chemical transformation and aerosol clean Film removal by chemical transformation and aerosol clean

1995-06-06

1998-08-11

Dang, Thi

Cleaning and liquid contact with solids

Processes

Using solid work treating agents

438906, B08B 500, H01L 2100

Patent

active

057922756

ABSTRACT:
A film layer not susceptible to aerosol cleaning is removed from a surface by converting the film layer into a film susceptible to aerosol cleaning, and aerosol jet cleaning the converted film and any contaminants. The aerosol jet can be moved in relation to the surface to provide thorough cleaning.

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