Film forming apparatus with particle prevention plate

Details Film forming apparatus with particle prevention plate Film forming apparatus with particle prevention plate

1996-04-22

1998-11-17

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

With treating means

118715, 20429811, C23C 1600, C23C 1424, C23C 1434

Patent

active

058370579

ABSTRACT:
A film-forming apparatus is provided with a particle prevention means, whose structure prevents a drop in film-yield due to particle formation. The particle prevention means does not need to be cleaned as frequently as known particle prevention means, thus increasing film production efficiency. This particle prevention means has a tongued-and-grooved surface. When the particle prevention means having a tongued-and-grooved surface is set in the film-forming apparatus, the film-forming material is deposited in a discontinuous manner on the particle prevention means, which can extend the time of film exfoliation, and in turn, extend the cycle for cleaning the particle prevention means, and prevent a drop in film-yield due to the film exfoliation.

REFERENCES:
patent: 3514391 (1970-05-01), Hablanian
patent: 4112196 (1978-09-01), Selig et al.
patent: 4313124 (1982-01-01), Hara
patent: 4345262 (1982-08-01), Shirato et al.
patent: 4459600 (1984-07-01), Sato et al.
patent: 4463359 (1984-07-01), Ayata et al.
patent: 4558333 (1985-12-01), Sugitani et al.
patent: 4723129 (1988-02-01), Endo et al.
patent: 4740796 (1988-04-01), Endo et al.
patent: 5065698 (1991-11-01), Koike
patent: 5135629 (1992-08-01), Sawada
patent: 5614071 (1997-03-01), Mahvan et al.
patent: 5711813 (1998-01-01), Kadoiwa et al.
G. Horky, Evaporator-Sputter Shield, IBM Technical Disclosure Bulletin vol. 23 No. 6. Nov. 1980.
Patent Abstracts of Japan, vol. 007, No. 285 (C-201) Dec. 20, 1983.
Patent Abstracts of Japan, vol. 015, No. 100 (C-0813) Mar. 11, 1991.
Patent Abstracts of Japan, vol. 15, No. 353 (C-0865), Sep. 6, 1991.
Patent Abstracts of Japan, vol. 10, No. 182 (C-356), Feb. 12, 1986.

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