Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2011-06-14
2011-06-14
Meeks, Timothy H (Department: 1715)
Coating processes
Coating by vapor, gas, or smoke
C427S008000
Reexamination Certificate
active
07959971
ABSTRACT:
When a multiple-panel forming process for producing a plurality of panels on a large-size substrate is employed, when production thereof is continued over a long period, or in other cases, a predetermined film thickness distribution can be stably obtained according to a method of the present invention. Vapor deposition on a substrate is performed by evaporating particles from a vapor deposition source arranged opposite to the substrate in a vacuum chamber. By changing a distance between the substrate and an opening provided at the vapor deposition source by a vapor deposition source position control mechanism, change with elapse of time in the film thickness distribution of a thin film formed on the substrate is controlled.
REFERENCES:
patent: 3639165 (1972-02-01), Rairden, III
patent: 2003/0234371 (2003-12-01), Ziegler
patent: 2004/0016400 (2004-01-01), Kim et al.
patent: 2000-265263 (2000-09-01), None
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patent: 2005-120441 (2005-05-01), None
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Asada, JP 2004-35964, English machine translation, May 2004.
Osamu, Machine trans of JP2005-120441, pub: May 2005.
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Meeks Timothy H
Miller, Jr. Joseph
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