Coating processes – Direct application of electrical – magnetic – wave – or... – Sonic or ultrasonic
Patent
1993-09-10
1996-10-29
Beck, Shrive
Coating processes
Direct application of electrical, magnetic, wave, or...
Sonic or ultrasonic
4272481, 4272551, 4272552, 4272553, 4272554, 427570, 427578, B06B 100
Patent
active
055695027
ABSTRACT:
A process and apparatus for depositing a film as desired on the surface of a substrate yet at a low temperature, said process comprising introducing a product gas into a film deposition chamber having provided therein a substrate being mounted on a support, and depositing a film on the surface of said substrate by activating said product gas inside said film deposition chamber while applying ultrasonic oscillation to said substrate.
REFERENCES:
patent: 5230925 (1993-07-01), Ohmine
Kawasaki Masashi
Koinuma Hideomi
Sumiya Masatomo
Beck Shrive
Costellia Jeffrey L.
Ferguson Jr. Gerald J.
Maiorana David M.
Semiconductor Energy Laboratory Co,. Ltd.
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