Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2005-03-04
2008-09-23
San Martin, Jaydi A (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S330000, C310S331000, C310S332000, C310S324000, C324S633000
Reexamination Certificate
active
07427819
ABSTRACT:
An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an acoustic reflector formed in an FBAR wafer and a surface. A first electrode is formed on the surface of the acoustic reflector and has a surface. A piezoelectric layer is formed on the surface of the first electrode and has a surface. A second electrode is formed on the surface of the piezoelectric layer. A motion plate is suspended in space at a predetermined distance relative to the surface of the second electrode and is capacitively coupled to the FBAR.
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Flower Graham M.
Grot Annette
Hoen Storrs T.
Larson, III John D.
Ruby Richard C
Avago Wireless IP Pte Ltd
Martin Jaydi A San
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