Film bulk acoustic resonator package and method of...

Details Film bulk acoustic resonator package and method of... Film bulk acoustic resonator package and method of...

2004-07-13

2009-11-10

Malsawma, Lex (Department: 2892)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257SE29324

Reexamination Certificate

active

07615833

ABSTRACT:
A microfabricated device has a first substrate, a second substrate, a film bulk acoustic resonator (FBAR) device, and a circuit. The second substrate is bonded to the first substrate to define a chamber. The FBAR device is located on a surface of the first substrate and inside the chamber. The circuit is located on a surface of the second substrate and inside the chamber. An electrical connection connects the circuit and the FBAR device.

REFERENCES:
patent: 3174122 (1965-03-01), Fowler et al.
patent: 3189851 (1965-06-01), Fowler
patent: 3321648 (1967-05-01), Kolm
patent: 3422371 (1969-01-01), Poirier et al.
patent: 3568108 (1971-03-01), Poirier et al.
patent: 3582839 (1971-06-01), Pim et al.
patent: 3590287 (1971-06-01), Berlincourt et al.
patent: 3610969 (1971-10-01), Clawson et al.
patent: 3826931 (1974-07-01), Hammond
patent: 3845402 (1974-10-01), Nupp
patent: 4084217 (1978-04-01), Brandis et al.
patent: 4172277 (1979-10-01), Pinson
patent: 4272742 (1981-06-01), Lewis
patent: 4281299 (1981-07-01), Newbold
patent: 4320365 (1982-03-01), Black et al.
patent: 4355408 (1982-10-01), Scarrott
patent: 4456850 (1984-06-01), Inoue et al.
patent: 4529904 (1985-07-01), Hattersley
patent: 4625138 (1986-11-01), Ballato
patent: 4640756 (1987-02-01), Wang et al.
patent: 4719383 (1988-01-01), Wang et al.
patent: 4769272 (1988-09-01), Byrne et al.
patent: 4798990 (1989-01-01), Henoch
patent: 4836882 (1989-06-01), Ballato
patent: 4841429 (1989-06-01), McClanahan et al.
patent: 4906840 (1990-03-01), Zdeblick et al.
patent: 5048036 (1991-09-01), Scifres et al.
patent: 5048038 (1991-09-01), Brennan et al.
patent: 5075641 (1991-12-01), Weber et al.
patent: 5118982 (1992-06-01), Inoue et al.
patent: 5129132 (1992-07-01), Zdeblick et al.
patent: 5162691 (1992-11-01), Mariani et al.
patent: 5166646 (1992-11-01), Avanic et al.
patent: 5241209 (1993-08-01), Sasaki
patent: 5241456 (1993-08-01), Marcinkiewicz et al.
patent: 5262347 (1993-11-01), Sands
patent: 5294898 (1994-03-01), Dworsky et al.
patent: 5382930 (1995-01-01), Stokes et al.
patent: 5384808 (1995-01-01), Van Brunt et al.
patent: 5448014 (1995-09-01), Kong et al.
patent: 5465725 (1995-11-01), Seyed-Boloforosh
patent: 5587620 (1996-12-01), Ruby et al.
patent: 5589858 (1996-12-01), Kadowaki et al.
patent: 5594705 (1997-01-01), Connor et al.
patent: 5671242 (1997-09-01), Takiguchi et al.
patent: 5692279 (1997-12-01), Mang et al.
patent: 5714917 (1998-02-01), Ella
patent: 5835142 (1998-11-01), Nakamura et al.
patent: 5853601 (1998-12-01), Krishaswamy et al.
patent: 5864261 (1999-01-01), Weber
patent: 5872493 (1999-02-01), Ella
patent: 5873153 (1999-02-01), Ruby et al.
patent: 5873154 (1999-02-01), Ylilammi et al.
patent: 5894647 (1999-04-01), Lakin
patent: 5910756 (1999-06-01), Ella
patent: 5932953 (1999-08-01), Drees et al.
patent: 5936150 (1999-08-01), Kobrin et al.
patent: 5953479 (1999-09-01), Zhou et al.
patent: 5982297 (1999-11-01), Welle
patent: 6040962 (2000-03-01), Kiyosumi
patent: 6051907 (2000-04-01), Ylilammi
patent: 6060818 (2000-05-01), Ruby et al.
patent: 6087198 (2000-07-01), Panasik
patent: 6090687 (2000-07-01), Merchant et al.
patent: 6107721 (2000-08-01), Lakin
patent: 6111480 (2000-08-01), Iyama et al.
patent: 6118181 (2000-09-01), Merchant et al.
patent: 6124756 (2000-09-01), Yaklin et al.
patent: 6150703 (2000-11-01), Cushman et al.
patent: 6187513 (2001-02-01), Katakura
patent: 6215375 (2001-04-01), Larson, III et al.
patent: 6228675 (2001-05-01), Ruby et al.
patent: 6229247 (2001-05-01), Bishop
patent: 6252229 (2001-06-01), Hays et al.
patent: 6262600 (2001-07-01), Haigh et al.
patent: 6262637 (2001-07-01), Bradley et al.
patent: 6265246 (2001-07-01), Ruby et al.
patent: 6278342 (2001-08-01), Ella
patent: 6292336 (2001-09-01), Cheng
patent: 6307447 (2001-10-01), Barber et al.
patent: 6307761 (2001-10-01), Nakagawa
patent: 6376280 (2002-04-01), Ruby et al.
patent: 6377137 (2002-04-01), Ruby
patent: 6384697 (2002-05-01), Ruby
patent: 6407649 (2002-06-01), Tikka et al.
patent: 6414569 (2002-07-01), Nakafuku
patent: 6420820 (2002-07-01), Larson, III
patent: 6424237 (2002-07-01), Ruby et al.
patent: 6429511 (2002-08-01), Ruby et al.
patent: 6434030 (2002-08-01), Rehm et al.
patent: 6437482 (2002-08-01), Akihiko
patent: 6441539 (2002-08-01), Kitamura et al.
patent: 6462631 (2002-10-01), Bradley et al.
patent: 6466105 (2002-10-01), Lobl et al.
patent: 6466418 (2002-10-01), Cheng
patent: 6469597 (2002-10-01), Ruby et al.
patent: 6469909 (2002-10-01), Simmons
patent: 6472954 (2002-10-01), Ruby et al.
patent: 6476536 (2002-11-01), Pensala
patent: 6479320 (2002-11-01), Gooch
patent: 6483229 (2002-11-01), Larson, III et al.
patent: 6486751 (2002-11-01), Barber et al.
patent: 6489688 (2002-12-01), Baumann et al.
patent: 6492883 (2002-12-01), Liang et al.
patent: 6507983 (2003-01-01), Ruby et al.
patent: 6515558 (2003-02-01), Ylilammi
patent: 6518860 (2003-02-01), Ella et al.
patent: 6525996 (2003-02-01), Miyazawa
patent: 6528344 (2003-03-01), Kang
patent: 6530515 (2003-03-01), Glenn et al.
patent: 6534900 (2003-03-01), Aigner et al.
patent: 6542055 (2003-04-01), Frank et al.
patent: 6548942 (2003-04-01), Panasik
patent: 6549394 (2003-04-01), Williams
patent: 6550664 (2003-04-01), Bradley et al.
patent: 6559530 (2003-05-01), Hinzel et al.
patent: 6564448 (2003-05-01), Oura et al.
patent: 6566979 (2003-05-01), Larson et al.
patent: 6580159 (2003-06-01), Fusaro et al.
patent: 6583374 (2003-06-01), Knieser et al.
patent: 6583688 (2003-06-01), Klee et al.
patent: 6593870 (2003-07-01), Dummermuth et al.
patent: 6600390 (2003-07-01), Frank
patent: 6601276 (2003-08-01), Barber
patent: 6603182 (2003-08-01), Low et al.
patent: 6617249 (2003-09-01), Ruby et al.
patent: 6617750 (2003-09-01), Dummermuth et al.
patent: 6617751 (2003-09-01), Sunwoo et al.
patent: 6621137 (2003-09-01), Ma et al.
patent: 6630753 (2003-10-01), Malik et al.
patent: 6635509 (2003-10-01), Ouellet
patent: 6639872 (2003-10-01), Rein
patent: 6651488 (2003-11-01), Larson et al.
patent: 6657363 (2003-12-01), Aigner
patent: 6668618 (2003-12-01), Larson et al.
patent: 6670866 (2003-12-01), Ella et al.
patent: 6693500 (2004-02-01), Yang et al.
patent: 6710508 (2004-03-01), Ruby et al.
patent: 6710681 (2004-03-01), Figueredo et al.
patent: 6713314 (2004-03-01), Wong et al.
patent: 6714102 (2004-03-01), Ruby et al.
patent: 6720844 (2004-04-01), Lakin
patent: 6720846 (2004-04-01), Iwashita et al.
patent: 6724266 (2004-04-01), Piazza et al.
patent: 6998940 (2004-07-01), Metzger
patent: 6774746 (2004-08-01), Whatmore et al.
patent: 6777263 (2004-08-01), Gan et al.
patent: 6787048 (2004-09-01), Bradley et al.
patent: 6788170 (2004-09-01), Kaitila et al.
patent: 6803835 (2004-10-01), Frank
patent: 6812619 (2004-11-01), Kaitila et al.
patent: 6828713 (2004-12-01), Bradley et al.
patent: 6842088 (2005-01-01), Yamada et al.
patent: 6873065 (2005-03-01), Haigh et al.
patent: 6873529 (2005-03-01), Ikuta
patent: 6874211 (2005-04-01), Bradley et al.
patent: 6874212 (2005-04-01), Larson, III
patent: 6888424 (2005-05-01), Takeuchi et al.
patent: 6900705 (2005-05-01), Nakamura et al.
patent: 6903452 (2005-06-01), Ma et al.
patent: 6906451 (2005-06-01), Hajime
patent: 6911708 (2005-06-01), Park
patent: 6917261 (2005-07-01), Unterberger
patent: 6924583 (2005-08-01), Lin et al.
patent: 6924717 (2005-08-01), Ginsburg et al.
patent: 6927651 (2005-08-01), Larson, III et al.
patent: 6936928 (2005-08-01), Hedler et al.
patent: 6936954 (2005-08-01), Peczalski
patent: 6946928 (2005-09-01), Larson et al.
patent: 6954121 (2005-10-01), Bradley et al.
patent: 6963257 (2005-11-01), Ella et al.
patent: 6975183 (2005-12-01), Aigner et al.
patent: 6977563 (2005-12-01), Komuro et al.
patent: 6985052 (2006-01-01), Tikka
patent: 6987433 (2006-01-01), Larson et al.
patent: 6989723 (2006-01-01), Komuro et al.
patent: 7019604 (2006-03-01), Gotoh et al.
patent: 7019605 (2006-03-01), Larson et al.
patent: 7057476 (2006-06-01), Hwu
patent: 7084553 (2006-08-01), Ludwiczak
patent: 7091649 (2006-08-01), Larson
patent: 7098758 (2006-08-01), Wang et al.
patent: 7170215 (2007-01-01), Namba et al.
patent: 7173504 (2007-02-01),

Affiliated with

Also associated with

Rating

Film bulk acoustic resonator package and method of... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Film bulk acoustic resonator package and method of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Film bulk acoustic resonator package and method of... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4099057