Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2006-08-22
2006-08-22
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S189000, C029S025350
Reexamination Certificate
active
07095298
ABSTRACT:
A film bulk acoustic resonator (FBAR) has a support structure, a piezoelectric resonator, and a signal line that is electrically connected, e.g., through a via, to the piezoelectric resonator, all on a semiconductor substrate. Support(s) and/or the via mount the piezoelectric resonator at a predetermined distance from the semiconductor substrate, allowing an ideal shape of the resonator to be realized. The signal line may include a patterned inductor. A capacitor can be formed between the via and the signal line. The resonance characteristics can be enhanced since the substrate loss caused by the driving of the resonator can be prevented due to an air gap formed by the predetermined distance. The resonance frequency can be adjusted by altering the pattern of the inductor, the capacitance of the capacitor and/or the thickness of the piezoelectric layer, also allowing Impedance matching to be readily realized.
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Ha Byeoung-ju
Kim Duck-hwan
Park Yun-kwon
Song Il-jong
Song In-sang
Lee & Morse P.C.
Samsung Electronics Co,. Ltd.
Summons Barbara
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