Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2007-04-17
2007-04-17
Schuberg, Darren (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S364000, C310S365000, C310S366000
Reexamination Certificate
active
10929569
ABSTRACT:
A film bulk acoustic resonator, and a method for manufacturing the same. The film bulk acoustic resonator includes a substrate, a protection layer vapor-deposited on the substrate, a membrane vapor-deposited on the protection layer and at a predetermined distance from an upper side of the substrate, and a laminated resonance part vapor-deposited on the membrane. Further, the manufacturing method includes vapor-depositing a membrane on a substrate, forming protection layers on both sides of the membrane, vapor-depositing a laminated resonance part on the membrane, and forming an air gap by removing a part of the substrate disposed between the protection layers. Accordingly, the membrane can be formed in a simple structure and without stress, and the whole manufacturing process is simplified.
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Ha Byeoung-ju
Hwang Jun-sik
Kim Duck-hwan
Kim Jong-seok
Park Yun-kwon
Aguirrechea J.
Samsung Electronics Co,. Ltd.
Schuberg Darren
Sughrue & Mion, PLLC
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