Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2006-01-04
2009-11-17
Lee, Benny (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C029S025350
Reexamination Certificate
active
07619492
ABSTRACT:
A film bulk acoustic resonator (FBAR) including a substrate having an etched air gap therethrough; a resonance part having a first electrode, a piezoelectric film and a second electrode which are laminated in turn above the air gap; and an etching resistance layer disposed between the air gap and the resonance part to limit an etching depth in forming the air gap, thereby preventing damage to the resonance part.
REFERENCES:
patent: 4456850 (1984-06-01), Inoue et al.
patent: 5160870 (1992-11-01), Carson et al.
patent: 6734763 (2004-05-01), Nishihara et al.
patent: 6767749 (2004-07-01), Kub et al.
patent: 6924717 (2005-08-01), Ginsburg et al.
patent: 7187253 (2007-03-01), Sano et al.
patent: 2003/0107456 (2003-06-01), Nishihara et al.
patent: 2004/0135144 (2004-07-01), Yamada et al.
patent: 2004/0211749 (2004-10-01), Grynkewich et al.
patent: 1 306 973 (2003-05-01), None
patent: 1 542 362 (2005-06-01), None
patent: 2000-91663 (2000-03-01), None
patent: 2000357931 (2000-12-01), None
patent: 2002344280 (2002-11-01), None
patent: 2003204239 (2003-07-01), None
patent: 2004007352 (2004-01-01), None
patent: 2001-0066811 (2001-07-01), None
patent: WO 2004/001964 (2003-12-01), None
Choi Hyung
Ha Byeoung-ju
Hong Seog-woo
Song In-sang
Lee Benny
Samsung Electronics Co,. Ltd.
Sughrue & Mion, PLLC
Wong Alan
LandOfFree
Film bulk acoustic resonator and a method for manufacturing... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Film bulk acoustic resonator and a method for manufacturing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Film bulk acoustic resonator and a method for manufacturing... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4087255