Filler for filling a gap and method for manufacturing...

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating

Reexamination Certificate

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C525S940000, C428S845000, C438S780000, C257SE29015

Reexamination Certificate

active

08058711

ABSTRACT:
A filler for filling a gap includes a hydrogenated polysiloxazane having an oxygen content of about 0.2 to about 3 wt %. A chemical structure of the hydrogenated polysiloxazane includes first, second, and third moieties represented by the following respective Chemical Formulas 1-3:The third moiety is on a terminal end of the hydrogenated polysiloxazane, and an amount of the third moiety is about 15 to about 35% based on a total amount of Si—H bonds in the hydrogenated polysiloxazane.

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Takahiro Gunji et al., “Preparation of Polysiloxazanes and Thier Transformation to Silcon Oxynitride”, 2006, Journal of Ceramic Society of Japan, vol. 114, No. 6, pp. 492-496.

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