Field-emission scanning auger electron microscope

Details Field-emission scanning auger electron microscope Field-emission scanning auger electron microscope

1986-01-24

1987-10-06

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250310, 250305, G01N 2300, H01J 3726

Patent

active

046985026

ABSTRACT:
An Auger electron microscope is equipped with a field-emission tip maintained at an essentially constant distance above the surface of the specimen. The tip may consist of a tungsten (100) whisker having a radius of .about.50 nm at the apex, the working distance being on the order of 1 mm. Auger electrons emitted from the surface of the specimen are collected by an electron energy analyzer for conventional processing. Mutual scanning displacement between the tip and specimen is obtained through use of an xyz-drive module, which is also responsible for adjusting the working distance of the tip. The entire microscope setup is mounted on vibration damping means and may be inserted into a vacuum system by means of an appropriate flange, if desired.

REFERENCES:
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patent: 4618767 (1986-10-01), Smith et al.
The Review of Scientific Instruments, vol. 43, No. 7, Jul. 1972, pp. 999-1011; R. Young et al., "The Topografiner: An Instrument for Measuring Surface Microtopography".
IBM Technical Disclosure Bulletin, vol. 24, No. 6, Nov. 1981, pp. 2855-2856, W. A. Thompson, "Mechanical Scanning Microscope".
"Vacuum-Tunneling Spectroscopy", Plummer et al. Physics Today, Apr. 1975, pp. 63-71, 250-423F.

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