Field emission electron gun

Details Field emission electron gun Field emission electron gun

1975-01-02

1976-01-06

Borchelt, Archie R.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, 313336, 315 31R, H01J 37285

Patent

active

039315193

ABSTRACT:
A field emission gun in which a field emission tip for generating charged particles is axially aligned with apertures in an intermediate electrode and a main electrode. A field electrode is placed in juxtaposition to the field emission tip for developing a particle generation field. This electrode is located relative to the field emission tip and the intermediate electrode to effect a predetermined focal distance and level of electron beam intensity. Use of a field electrode permits utilization of lower focusing and acceleration voltages and renders the device less sensitive to variations in field emission tip design and performance.

REFERENCES:
patent: 3141993 (1964-07-01), Hahn
patent: 3191028 (1965-06-01), Crewe
patent: 3602710 (1971-08-01), Mueller

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