Field emission display and method for fabricating the same

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device

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430312, 430314, 216 11, G03C 500

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active

056208324

ABSTRACT:
A field emission display, and method of making, including: a first substrate; a transparent electrode formed on the first substrate; a fluorescent layer of emitting light formed on a predetermined area of the transparent electrode; an insulating layer formed around the fluorescent layer on the other areas of the transparent electrode; a gate electrode formed on the insulating layer; a second substrate; a conductive cathode layer formed on the second substrate; and a tip for emitting electrons formed on the conductive cathode layer, the tip being aligned with the fluorescent layer in such a way that they may stand opposed to each other at a distance under a vacuum condition. The electrons are emitted from the tip of the fluorescent layer under control of the gate electrode. The tip is formed by taper-etching the tip layer in a RIE process. Subsequent evaporation of the tip to sharpen it is not necessary. This simplifies, and cuts the cost of, fabrication of the FED.

REFERENCES:
patent: 4968585 (1990-11-01), Albrecht et al.
patent: 5391259 (1995-02-01), Cathey et al.
patent: 5461009 (1995-10-01), Huang et al.

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