Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly
Patent
1996-07-23
1997-12-09
Swann, J. J.
Electric lamp or space discharge component or device manufacturi
Process
With assembly or disassembly
445 49, 445 50, H01J 130, H01J 918
Patent
active
056953780
ABSTRACT:
An electron emitter plate (110) for an FED image display has an extraction (gate) electrode (22) spaced by a dielectric insulating spacer (125) from a cathode electrode including a conductive mesh (18). Arrays (12) of microtips (14) are located in mesh spacings (16), within apertures (26) formed in clusters (23) in extraction electrode (22). Microtips (14) are deposited through the apertures (26). The insulating spacer (125) is etched to undercut electrode (22) to connect apertures, forming a common cavity (141) for microtips (14) within each mesh spacing (16). Support beam structures (143) are deposited onto extraction electrode (22), either separately or simultaneously with formation of the microtips (14). The support beam structures (143) span the cavity (141) to support the extraction electrode (22) above the cathode electrode over cavity (141). The etch-out reduces the dielectric constant factor of gate-to-cathode capacitance in the finished structure. Strengthening the gate (22) with structures (143) enables gate support over the cavity (141).
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Hecker, Jr. Phil E.
Levine Jules David
Yui Robert E.
Brady III Wade James
Donaldson Richard L.
Franz Warren L.
Knapp Jeffrey T.
Swann J. J.
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